Polarized light reflectometer.
نویسنده
چکیده
The modulated reflected and nonreflected light fluxes, measured as the azimuth of incident linearly polarized light is varied, yield the absolute reflectances R(p), and R(s), of a dielectric or semiconductor surface. Application to a reflective Si detector determines the refractive index and thickness of a SiO(2) film on the detector surface.
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ورودعنوان ژورنال:
- Applied optics
دوره 33 25 شماره
صفحات -
تاریخ انتشار 1994